Branson / IPC S4100-112220 Plasma Asher/ Cleaner from SEMICORE

System is available in excellent condition and fully operational prior to shut down. Currently fully operational at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.

Configuration:

12”diameter X 20” long Quartz Reaction Chamber with swing open front door.
ENI OEM12B. 1200 watt,13.56Mhz RF Generator with matching network.
OEM operator controls with single process gas inlet.
Edwards E2M80 mechanical roughing pump.

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