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SYSTEM FABRICATION
Cabinet, Steel Framework, System Mounted on castors
Fully-enclosed system cabinet with full opening service door
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DEPOSITION CHAMBER:
19.5"diameter X 30" high, stainless steel, water-cooled bell jar
20" diameter stainless steel base plate with 1" diameter feedthrough
ports
One (1) complete set of stainless steel chamber and source chamber
shielding
Motorized bell jar hoist assembly
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PUMPING SYSTEM:
Cryogenic pump
CTI-8 cryo with SC helium compressor
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ROUGHING PUMP
27 cfm roughing pump
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HIGH VACUUM VALVES
HV valve, roughing valve, foreline valve, vent valve.
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CHAMBER GAUGING:
Granville Phillips combination ionization and TC gauge.
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VACUUM CONTROLLER:
CHA AutoTech II Auto/Manual vacuum valve sequence controller with vacuum
map and static indicator lights for valve positioning. (Auto/Manual mode
protected via keylock selector switch)
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DEPOSITION:
E-beam
6 pocket,15cc Electron Beam Gun
6 pocket crucible indexer.
CV-8, 8kW power supply with X-Y beam sweep controller.
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DEPOSITION SOURCE SHUTTER:
Electro-pneumatic source shutter
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DEPOSITION Controller
Inficon IC5 Quartz crystal deposition controller
Single quartz crystal sensor (water-cooled)
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SUBSTRATE HEAT: Optional
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SUBSTRATE FIXTURING:
Planetary or Lift-off tooling available.
Substrate rotation assembly with variable speed drive motor.
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SYSTEM DOCUMENTATION:OEM manuals.
