The Semicore SC2800 is an automatic, computer controlled sputter deposition system. The system is configured for sputter down, sequential deposition designed for multi-wafer processing.  Excellent “Like New” condition. Fully remanufactured and upgraded in 2002. Used less than 4 months after complete rebuild!

Semicore SC2800 DC Magnetron Sputtering System consisting of:

• Qty (2) 8" targets and Qty (1) 6" target
• 23” diameter rotating substrate table capable of holding various shaped substrates or wafers. Contact Semicore for more information on suitability for your specific application.
• Two Gas Channels with MKS 246 Mass Flow Controllers
• Advanced Energy MDX5, 5-kW DC Magnetron power supply for DC Magnetron sputter process.
• MKS 252D Exhaust Valve Controller
• CTI Cryotorr 8 Cryopump with helium compressor
• Edwards E2M40 mechanical vacuum pump
• All vacuum valve sequencing controlled via the PLC/PC control system.
• PC-PLC Control System with touch screen for automatic vacuum valve sequencing, process control and system monitoring.
• System has was used for less than 4 months to sputter Gold, Nickel, and Chrome at Start-up company.
• Complete set of Manuals and Documentation

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