Remanufactured E-beam Equipment Airco Temescal SC 3200

Semicore has completely stripped the system, powder coated the frame, and chemically cleaned the chamber and major vacuum components to like new condition. A new lower gun well has been combined with a complete new control and electrical architecture and the source-to-substrate distance was significantly increased for better uniformity.

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Remanufactured E-beam Equipment Airco-Temescal SC 3200

Configuration:

1.PC/PLC CONTROL ARCHITECTURE
2.SOURCE ISOLATED GATE VALVE
3.TELEMARK SIX POCKET E-BEAM EVAPORATION GUN
4.TELEMARK TT-15 POWER SUPPLY
5.TELEMARK PROGRAMMABLE SWEEP CONTROL
6.INFICON IC-5 DEPOSITION RATE CONTROL
7.QUICK-CHANGE UNIFORMITY OR LIFT-OFF TOOLING
8.CTI-400 CRYOGENIC PUMP
9.BUILT IN RGA TOLERANCE CHECKING
10.GRANVILLE PHILLIPS GAUGE CONTROLLERS

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