Remanufactured SC 603 (MRC 603)

Semicore has completely stripped the system, powder coated the frame, and chemically cleaned the chamber. All new Stainless Steel vacuum components, valves and plumbing.

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Configuration:
1. Three (3) DC or RF (selectable) Magnetron target assemblies.
2. RF sputter etch.
3. IR Heating.
4. Closed loop process gas control.
5. Repeat Scan, Shuttered Pallet control.

Controls:
Touch Screen Monitor
PC/PLC Semicore Automation Package.

Components:
GP307 -Granville Phillips Ion/convectron gauge.
CTI ®-8 Cryogenic Pump.
Austin Scientific temperature readout.
MeiVac Throttle valve.
MKS 651-gas control.
9600 Compressor.
Advanced Energy MDX-10 DC Power Supply
Advanced Energy RF power supply and matching network.

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