Semicore SCE 600 (CHA 600 equivalent) Evaporation System remanufactured by SEMICORE

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately

Configuration:

19” D X 30” H Stainless Steel, Water-Cooled Process Chamber
with Motorized Hoist
CTI-8 Cryogenic Pump w/ Compressor
PC/PLC Automation Control System for one-button operation.
Four Pocket Electron Beam Gun with Indexer.
10kW Electron Beam Power Supply with X-Y Beam Sweep Control.
Deposition Rate – Process Controller
Rotating Planetary Tooling for 4” diameter wafers. (Alternative tooling types and size available upon request)

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