| System
is available at Semicore,
Livermore, CA.
System was fully operational at time of
shut down.
Upgrades and modification may be quoted separately.
System Configuration
- Deposition Chamber
size is 36" diameter X 46" high with swing open front door.
Stainless steel material. Chamber pumped with a CTI-10 cryogenic
pump and 9600 helium compressor. Also equipped with a 10 MeiVac
Servo Throttle valve and HVA 10 stainless steel high vac valve.
- Load lock chamber
with a 10 diameter stainless steel HVA high vacuum valve. LL pumped
with a CTI-8 cryogenic pump and 8200 compressors. Includes HVA 8
stainless steel high vacuum valve.
- Alcatel roughing
pump. Both cryo's have a HVA stainless steel high vacuum valve for
isolation.
- Evaporation
equipment includes: Telemark 4 pocket, E-gun, 25cc with removable
top plate. Telemark ST-6 Solid State, 6 kW electron beam power
supply with upgraded point-to- point programmable X-Y sweep
controller.
- XTC 2 Deposition
Rate Monitor with 6 position crystal head, Granville Phillips 356
Ionization - TC controller (X2) one each for the chamber and the
other for the load lock.
- GE 90-30
programmable logic controller with PC. Also a manual control panel.
- Spectra Residual
Gas Analyzer
- Manuals and
schematics.
- Frame size: 144
Long X 57 Wide X 104 High.
- Utilities: 460
Volt, 60 Cycle, 3 Phase, 100 Amp. 60-120 min/max air pressure, 11
GPM min water.
If
you entered this page directly from a search engine, click
here to visit SEMICORE.
|
