Temescal VES 2550 Electron Beam Evaporation System

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.

CONFIGURATION:

25.5-inch diameter x 12-inch high stainless steel, water-cooled deposition chamber designed for waist high substrate loading and unloading.
25.5-inch diameter x 20 inch high stainless steel, evaporation source chamber with model VV-400 View Vac view port with Teflon film.
CTI 400 On-Board cryogenic pump. (Recently rebuilt).
CTI 9600 Helium compressor. (Purchased new 2 month prior to system shutdown)
Mechanical vacuum pump.
Auto / manual vacuum valve sequence controller
Ionization gauge and thermocouple gauge controller.
Inficon IC6000 Auto/Manual Deposition rate / process controller.
CV-14, 14kW electron beam power supply with X-Y beam sweep controller.
Temescal Four (4) pocket electron beam gun with crucible indexer.
Source shutter assembly fully integrated with deposition controller.
Substrate tooling for Lift-off deposition process. (Optional tool quoted seperatly)
System manuals
Optional: Neslab HX350 air cooled water chiller / recurculator.Vintage: 1991

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