CHA Industries PVD systems refurbished by SEMICORE

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.

ID# P1010024

VACUUM SYSTEM
19.5"diameter X 30" high, stainless steel, water-cooled bell jar
20" diameter stainless steel base plate with 1" diameter feedthrough ports
One (1) complete set of stainless steel chamber and source chamber shielding
Motorized bell jar hoist assembly, ¼ h.p., Model MH302
CTI-8 cryogenic pump & compressor
Complete vacuum manifolding: HV valve, roughing valve, foreline valve, vent valve.
Direct drive mechanical vacuum pump.
Modern metal cabinet fully enclosed with removal panels for ease of maintenance.

CONTROL SYSTEMS
CHA AutoTech II Auto/Manual vacuum valve sequence controller with vacuum map and static indicator lights for valve positioning. (Auto/Manual mode protected via keylock selector switch)
Granville-Phillips Model 307 ionization and thermocouple gauge controller.
Syscon multi-layer deposition rate controller with crystal sensor head.
Automatic deposition control for automatic deposition system operation

EVAPORATION SOURCE (S) & ACCESSORIES
Telemark four pocket electron beam gunwith automatic crucible indexder.
Swing-in resistance evaporation sources with SCR power supply.
Source shutter assembly with electro-pneumatic actuator.
CHA SR10 electron beam power supply with X-Y beam sweep.
(6kW heater power supply with 4 kW substrate heater array. Optional)
Complete single rotating substrate fixturing for lift-off process with water-cooled track ring
(Uniformity substrate tooling. Optional)
Planetary offset drive assembly with dive motor and variable speed controller

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