CHA 600 Evaporation system remanufactured by SEMICORE

Available for immediate delivery. System demonstration available prior to order

VACUUM SYSTEM
19.5"diameter X 30" high, stainless steel, water-cooled bell jar
20" diameter stainless steel base plate with 1" diameter feedthrough ports
Motorized bell jar hoist assembly
Direct drive mechanical vacuum pump.
CTI 10, 10 ASA Cryogenic pump with compressor

CONTROL SYSTEMS
New SC PLC Automatic vacuum valve sequence controller.
New Granville-Phillips Model 307 ionization and thermocouple gauge controller.
New Maxtek 360 multi-layer deposition rate and thickness controller.

EVAPORATION SOURCE (S) & ACCESSORIES
New Telemark six (6) pocket electron beam gun with automatic crucible indexer.
New Telemark TT-10, 10 kW electron beam power supply with beam sweep controller.
4 kW substrate heater array.
Single rotating substrate fixturing for lift-off deposition process.

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