Perkin-Elmer has been a workhorse of the sputtering industry since the 1980s. Semicore’s fully upgraded and re-engineered Perkin-Elmer 4400 Series is an excellent PVD equipment purchase value for a wide range of thin film applications that require high throughput, high yield and optimum process control.

Perkin-Elmer Sputtering Systems are a robust built platform and have an established installed base in the thousands of units which makes parts and servicing relatively easy. Every aspect of these systems has been upgraded to meet today’s demanding technology and machine safety standards. Each Perkin-Elmer 4400 Series Sputtering System has gone through Semicore’s rigorous remanufacturing and testing process with documented performance results that guarantees you are buying a unit with proven reliability, versatility and low cost of operation.

The Perkin-Elmer 4400 Series is a fast cycle, water cooled load locked system that utilizes circular or delta style cathodes. A big advantage of the fast cycle load lock is that it eliminates the need to vent the process chamber for loading and unloading the substrates. This cuts the need for chamber pump down time, reduces the likelihood of contamination and need for target burn-in thus increasing material utilization.

Flexible enough to be used for R&D development as well as high volume, high yield production environments. The Perkin-Elmer 4400 Series employs an ultra-clean two-stage cryogenic or turbomolecular pump to maintain the stainless-steel process chamber at high vacuum.

Dual Chamber Auto Load Lock System
Dual Chamber Auto Load Lock System

Perkin Elmer Sputtering Systems have not only been at the heart of the semiconductor industry for decades, but its flexibility, simplicity and reliability has made it a mainstay of the manufacturing of a wide range of electronic components and optical coatings.

High Throughput
The fast load lock design enables a quick and easy turnaround on batch loads across a wide range of substrate sizes and configurations.

High Yield
A rotating substrate table enables multi-pass deposition for uniformity and easily reproducible, high quality results across multiple runs.

Maximum Process Control
Able to utilize a broad range of target materials and operate across a wide range of operating models including DC Magnetron, RF Magnetron, RF Diode, Reactive Sputtering and Co-Sputtering.

Dual Chamber Isolation Door
Dual Chamber Isolation Door

Total Control of Critical Thin Film Deposition Qualities
Yielding excellent quality films for a wide variety of materials including aluminum alloys, titanium-tungsten, platinum silicide, nichrome-gold, silicon dioxide, silicon nitride, permalloy and precious metals, the Perkin-Elmer 4400 Series is one of the most versatile tools on the market today.

Deposition of Thin Film for VLSI Geometries
Every thin film requires an optimum combination of the target material’s size and shape for the most cost effective application of the PVD coating. The Perkin-Elmer 4400 Series provides two types of target configurations: 8” circular and delta-shaped cathodes.

 

No Single Unit is Perfect for Every Application

Semicore Equipment offers the entire line of Perkin-Elmer Sputtering Systems.

Perkin-Elmer 4400
A general-purpose sputtering system with up to four 8 inch diameter circular cathodes that can utilize DC Magnetron, RF Magnetron or RF Diode configurations which may be sputtered sequentially without breaking vacuum. Power sources are available up to 2 kW RF and 5 kW DC.

Water Cooled Cathodes
Water Cooled Cathodes

Perkin-Elmer 4410
Designed primarily for high deposition rates of both metals and metal alloys, the Perkin-Elmer 4410 is also adaptable for the deposition of dielectrics or non-conducting coatings. It utilizes up to three delta-shaped cathodes in DC Magnetron, RF Magnetron or RF Diode configurations with power sources available up to 3 kW RF and 10 kW DC.

Perkin-Elmer 4450
A delta target sputtering system similar to Model 4410 but with load lock pumping and substrate heating included as standard operating features.

Perkin-Elmer 4480
A delta target sputtering system of identical design to Model 4450 but including cassette-to-cassette loading as a standard feature.

Perkin-Elmer 2400
Ideal for research and development laboratories or low-volume production environments where high throughputs are not as critical, the 2400 Series is the ideal economical alternative for high quality sputtering for many applications.

 

What Makes Semicore’s Remanufactured Re-Engineered Units the Best?

Compared to the competition which primarily refurbishes the old legacy equipment with some upgrades and gives them new power supplies, Semicore’s approach is completely different which results in the highest quality system upgrade possible.

Loading Chamber Heating Elements
Loading Chamber Heating Elements

Semicore totally remanufactures and re-engineers the sputtering machines. What is the difference between refurbishing and remanufacturing?

Think in terms of the automotive perspective. To “refurbish” a car would mean to clean it up, fix any broken issues and replace outdated items like the tires and radio with current versions and slap a quick paint job on it to help the sale.

In Semicore’s version, it would be “remanufactured” and where the original design was lacking, “re-engineered”. This means we start by stripping the car down to the frame, make changes where necessary and start the build process with new drive-train and a freshly reconditioned body. Finish it with paint, wheels, and plush interior and you have a show car that will last.

Our clientele doesn’t want just a reworked legacy “Model T”. They want a system that will meet or exceed their process requirements with high reliability and performance for the next generation.

This is the real difference between what the competition sells and Semicore delivers – Quality!

Super Clean Turbomolecular Pump
Super Clean Turbomolecular Pump

An industry leader for over two decades with the electrical engineering, mechanical engineering, automation engineering and manufacturing staff in house under one roof in Northern California. Other companies contract out for many of these. Semicore provides a turnkey solution with the long-term value and of course, we service everything we sell.

Our clients who demand the very highest level of performance from their PVD equipment include the Lawrence Livermore National Laboratory, Vishay, Lockheed Martin, Honeywell, Sandia National Laboratory, L3 Technologies, CREE, Johnson & Johnson and First Solar.

Semicore’s Perkin-Elmer
Remanufacturing Checklist

Semicore Award Winning Graphical User Interface
Semicore Award Winning
Graphical User Interface
  • We start by completely stripping the system to the bare frame.
  • The frame is then modified to our standards and then electro-static powder coated.
  • Vacuum chambers are reconditioned, chemically cleaned and electro-polished for a “like new” finish.
  • Custom stainless steel vacuum manifolds are designed to accommodate the required configuration.
  • New high vacuum pumps are selected for the desired configuration.
  • All original controls and wiring are scrapped. A completely new design is employed to current industry and safety standards.
  • New sputter power supplies such as DC, Pulse DC, RF generators and matching networks are selected as per the desired configuration. Semicore offers a wide range of deposition capabilities not found elsewhere.
  • The whole RF package is completely redesigned for both the deposition and the etch/bias processes to be stable and repeatable.
  • All vacuum feedthroughs are replaced with current ferro-fluidic designs that offer long life with great vacuum performance.
  • Semicore’s award winning Human Machine Interface (HMI) software is coupled with our proven stable machine control architecture is installed configured for the application.
  • Each system is thoroughly leak tested and come with Leak Rate Performance certificates.
  • The vacuum chamber is scanned with a residual gas analyzer with fully documented results.
  • Extensive process performance tests are completed prior to the Factory Acceptance Test (FAT).
  • Complete top level engineering documentation is supplied with each unit including: electrical schematics, mechanical assembly drawings, recommended spare parts list, operations and component manuals and a subscription to the Semicore Self Service Center online where you can obtain copies of all system documentation, get updates and request support for your machine.

 

Guarantees and Warranties

Perkin-Elmer Sputtering Systems Port
Viewing Port

Semicore Equipment fully guarantees every unit’s performance as configured and provides a written guarantee and complete system warranty. We will do the installation at your facility with a comprehensive site acceptance test for your review and sign off upon completion.

Our systems are designed and documented to meet the highest electrical and safety agency standards including; The National Fire Protection Agency, National Electrical Code, Underwriters Laboratory and the Canadian Standards Association. Most importantly, we comply fully with certified Third Party Safety Compliance inspections and build to the highest safety standards mandated in the world.

 

Please Be Sure to Read Our FAQs Page and Watch Our Video

PVD Sputtering Equipment: What You Must Know Before Purchasing

 

Semicore Equipment Inc., a leading worldwide supplier of sputtering equipment for the electronics, optical, solar energy, medical, military and related high tech industries. Please let our helpful support staff answer any questions you have regarding Perkin-Elmer Sputtering Systems and how to implement the best technology and processes for your specific PVD Sputtering Equipment needs by contacting us at sales@semicore.com or by calling 925-373-8201.

 

Related Articles

PVD Coating ProcessWhat is PVD Coating?

Physical Vapor Deposition - also known as PVD Coating - refers to a variety of thin film deposition techniques where solid metal is vaporized in a high vacuum environment and deposited on electrically conductive materials as a pure metal or alloy coating. As a process that transfers the coating material on a single atom or molecule level, it can provide extremely pure and high performance coatings which for many applications are much preferable to electroplating .... Read More

 

Reactive Sputtering EquipmentWhat is Reactive Sputtering?

Reactive Sputtering is the process of adding a gas like Oxygen or Nitrogen to the vacuum chamber that undergoes a chemical reaction with the coating material before being deposited as a thin film on a substrate. .... Read More

 

Small Chamber Sputtering EquipmentAdvantages Of Small Chamber Confocal Sputtering Equipment For Research & Development

Whereas commercial Sputter systems are often geared to large scale production volume of established processes, there is also a need for smaller scale sputtering systems for research and development where versatility is generally more important than volume throughput. These same smaller sputtering systems can also serve for lower volume initial production. .... Read More