- 19.5"diameter X 30" high, stainless steel, water-cooled bell jar
- 20" diameter stainless steel base plate with 1" diameter feedthrough ports
- One (1) complete set of stainless steel chamber and source chamber shielding
- Motorized bell jar hoist assembly
- CTI-8 On-Board cryogenic pump w/ compressor
- Complete vacuum manifolding
- Direct drive mechanical vacuum pump
- CHA AutoTech II Auto/Manual vacuum valve sequence controller with vacuum map and static indicator lights for valve positioning. (Auto/Manual mode protected via keylock selector switch)
- Granville-Phillips Model 307 ionization and thermocouple gauge controller
- Leybold – Inficon IC5 multi-layer deposition rate controller with crystal sensor head
- Automatic deposition sequence controller
- Two “Swing-in” thermal evaporation sources. Each source is designed to automatically swing in to position (optical center of chamber) for optimal deposition uniformity
- Complete single rotating substrate fixturing for lift-off process with water-cooled track ring(Uniformity substrate tooling. Optional)
- Planetary offset drive assembly with dive motor and variable speed
