Specifications:

Balzers vacuum chamber, water cooled.
Dual swing open access doors.
CTI 400 On-Board Cryo Pump with helium compressor.
High vacuum isolation valve.
Maximum overall machine dimensions: Height: 108 in, Width: 84 in, Depth: 75 in.
Internal chamber dimensions: Height: 38 in, Width: 53 in, Depth: 48 in.
Note: The chamber is equipped with a 40” diameter removable top and bottom flanges that can be modified to meet a variety of substrate tooling and source configurations.
Available in 'As-Is' Condition or Refurbished to customer specification.

Balzers Vacuum Chamber

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.