- Stainless Steel horizontal process chamber, 32-inch diameter by 32-inch long, water-cooled with 2-3/4 inch conflat flange in rear of chamber and multiple 1-inch instrument feedthroughs.
- Full opening, water-cooled swing down access door with two 4-inch diameter view port. Viton “J” gasket sealing.
- Rear chamber access door, water-cooled. This allow the potential for ease of maintenance from outside the clean room in a through wall configuration.
- 16” Stainless Steel high vacuum gate valve. Note: The high vacuum valve’s vertical sealing plane eliminates high vacuum leaks caused by falling particles.
- 18” x 18” x 24” stainless steel pumping module with 16 inch vertical sealing high vacuum isolation valve.
- CTI On-Board cryogenic water pump with helium compressor.
- High vacuum cryogenic pump package consisting of the following:
- CTI-400 cryogenic pump.
- CTI On-board water pump.
- Two CTI 8500 helium compressors.
- (4) 10ft helium lines and power cables.
- Standard CHA Mark 50 steel base frame for vacuum chamber with integrated instrument rack to support power supplies, PC/PLC and associated electronics. The frame is equipped with heavy duty caster wheels
- All required frame enclosure panels with safety interlocks.
Note: Frame and panel surfaces are stripped to bare metal then
electrostatics powder coated and oven baked for clean room
compatibility.
- PLC automatic / manual vacuum valve sequence controller.
- Inficon IC-5 Multi-layer deposition rate controller with dual crystal sensor module. The rate controller is integrated with related components for automatic deposition process control.
- New Granville-Phillips Ionization and Convectron gauge controllers for vacuum pressure measurement
- TFI-Telemark Model 271, four pocket electron beam gun with removable top plate.
- Four pocket automatic crucible indexer.
- TFI-Telemark TT10,10 kW electron beam power supply with X-Y beam sweep controller.
- 8 kW substrate heater array with SCR controller.
- Ion Tech, 12.5cm x 22cm Ion source with MPS300FC power supply.
- New Lift-off, single dome configured for 100 mm substrates.
- Electrical: 208V/3Phase/50-60Hz/5Wire. Single service electrical enclosure with all required circuit breakers, relays, terminal, and all incoming power breaker conveniently located for ease of maintenance. Includes: Emergency Machine Off (EMO) buttons located in front and rear of the system interfaced to main circuit.
