- 19.5"diameter X 30" high, stainless steel, water-cooled bell jar
- 20" diameter stainless steel base plate with 1" diameter feedthrough ports
- One (1) complete set of stainless steel chamber and source chamber shielding
- Motorized bell jar hoist assembly, ¼ h.p., Model MH302
- CTI-8 cryogenic pump & compressor
- Complete vacuum manifolding: HV valve, roughing valve, foreline valve, vent valve.
- Direct drive mechanical vacuum pump.
- Modern metal cabinet fully enclosed with removal panels for ease of maintenance.
- CHA AutoTech II Auto/Manual vacuum valve sequence controller with vacuum map and static indicator lights for valve positioning. (Auto/Manual mode protected via keylock selector switch)
- Granville-Phillips Model 307 ionization and thermocouple gauge controller.
- Syscon multi-layer deposition rate controller with crystal sensor head.
- Automatic deposition control for automatic deposition system operation
- Telemark four pocket electron beam gunwith automatic crucible indexder.
- Swing-in resistance evaporation sources with SCR power supply.
- Source shutter assembly with electro-pneumatic actuator.
- CHA SR10 electron beam power supply with X-Y beam sweep.(6kW heater power supply with 4 kW substrate heater array. Optional)
- Complete single rotating substrate fixturing for lift-off process with water-cooled track ring(Uniformity substrate tooling. Optional)
- Planetary offset drive assembly with dive motor and variable speed controller
