- Veeco 'Spectra' Stainless steel chamber, water cooled
- Multiple conflate and 1 inch feed thru parts
- 16 inch CTI 400 Cryo Pump with helium compressor
- HVA stainless steel high vacuum valve
- 4 pocket Telemark Electron Beam Gun
- Maximum overall machine dimensions: Height: 77 in, Width: 85 in, Depth: 83 in.
- Internal chamber dimensions: Height: 38.5 in, Width: 40 in, Depth: 42 in
- Telemark 379 Automatic Crucible Indexer
- Inficon XTC/2 Deposition Controller
- Temescal CV-8 Power Supply with XY Sweep Control
- PLC Vacuum Sequence Controller
- Granville-Phillips 307 ion gauge controller
