Temescal (BOC Edwards) FC 1800 (Fast-Cycle) E-beam Evaporation System

SYSTEM FABRICATION:

• Cabinet, Steel Framework, System Mounted on castors
• Fully-enclosed system cabinet with full opening service door

DEPOSITION CHAMBER:

• 20-inch diameter x 9-inch high stainless steel, deposition chamber designed for waist high substrate loading and unloading.
• 18-inch diameter stainless steel, evaporation source chamber with viewport
• Isolation valve between substrate and source chambers.

PUMPING SYSTEM:

• Cryogenic pump
• CTI-8 cryo with SC helium compressor

ROUGHING PUMP:

• 27 cfm roughing pump

HIGH VACUUM VALVES

• High Vacuum poppet valve
• Roughing, Leak-check, Backing, and Vent Valves

VACUUM CONTROLLER:

• Temescal Auto/Manual vacuum sequence controller.

CHAMBER GAUGING:

• Versavac combination ionization and TC gauge.

DEPOSITION:

• E-beam
• 4 pocket Electron Beam Gun
• 4 pocket crucible indexer.
• CV-8, 8kW power supply with X-Y beam sweep controller.

DEPOSITION SOURCE SHUTTER:

• Electro-pneumatic source shutter.

DEPOSITION Controller

• FDC 8000 Quartz crystal deposition controller
• Single quartz crystal sensor (water-cooled)

SUBSTRATE HEAT:

• Optional

SUBSTRATE FIXTURING:

• Planetary or Lift-off tooling available.
• Substrate rotation assembly with variable speed drive motor.

SYSTEM DOCUMENTATION:

• OEM manuals