MRC Model MRC 903M

System is available in a fully operational and demonstrated condition at Semicore, Livermore, CA. Upgrades and modification may be quoted separately.

System Specifications

Manufacturer and Model -- MRC Model 903M
Load Lock Sputtering System
3 Target Capacity - Target Size 5" x 15"
RF/DC Sputtering Capability
RF Substrate Etch
Substrate Heat (optional)
CTI-8 High Vacuum Cryogenic Pump & Compressor
Direct Drive Mechanical Vacuum Pump