- Deposition Chamber size is 36" diameter X 46" high with swing open front door. Stainless steel material. Chamber pumped with a CTI-10 cryogenic pump and 9600 helium compressor. Also equipped with a 10 MeiVac Servo Throttle valve and HVA 10” stainless steel high vac valve.
- Load lock chamber with a 10” diameter stainless steel HVA high vacuum valve. LL pumped with a CTI-8 cryogenic pump and 8200 compressors. Includes HVA 8” stainless steel high vacuum valve.
- * Alcatel roughing pump. Both cryo's have a HVA stainless steel high vacuum valve for isolation.
- Evaporation equipment includes: Telemark 4 pocket, E-gun, 25cc with removable top plate. Telemark ST-6 Solid State, 6 kW electron beam power supply with upgraded point-to- point programmable X-Y sweep controller.
- XTC 2 Deposition Rate Monitor with 6 position crystal head, Granville Phillips 356 Ionization - TC controller (X2) one each for the chamber and the other for the load lock.
- GE 90-30 programmable logic controller with PC. Also a manual control panel.
- Spectra Residual Gas Analyzer
- Manuals and schematics.
- Frame size: 144” Long X 57” Wide X 104” High.
- Utilities: 460 Volt, 60 Cycle, 3 Phase, 100 Amp. 60-120 min/max air pressure, 11 GPM min water.
