What is Glancing Angle Deposition (GLAD)?

Glancing angle deposition (GLAD) is a thin film deposition technique in which a substrate is placed at an angle to the direction of the coating vapor flux, while that substrate is rotated or manipulated to control the film’s characteristics and growth. It is primarily used as an electron-beam thermal evaporation process, but it is also sometimes used with sputtering coatings.
GLAD is a refinement of oblique angle deposition (OAD). Oblique means slanted less than 90 degrees. In OAD, the substrate is stationary and placed at an oblique angle to the direction of deposition flux so as to control columnar and helical nanostructure growth.
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