New In-Line Sputtering Systems & Batch Sputtering Equipment

Whatever you are looking for in a sputtering system there is probably a more advanced Semicore version that is tested, proven and stable and will give you more for your money. When you think you have found what you are looking for with a sputter coater, be sure to check with Semicore and read our FAQs regarding Physical Vapor Deposition Equipment: What You Must Know Before Purchasing to ensure you are getting all you can.

Some specific examples of in-line and batch sputtering machines are pictured below – for a complete list of evolutionary OEM versions along with their specifications and improvements contact your Semicore Equipment, Inc. representative.

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Model: TriAxis-LL

Batch Sputtering Evaporation SCTriAxisLL

TriAxis-LL Multi Source Sputtering System with Load Lock

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Confocal Cathode Sputtering (PDF)

Model: CAPOS

Batch Sputtering Evaporation CAPOS

CAPOS PVD Multi-Target Sputtering System

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CAPOS-CT PVD Sputtering System

CAPOS-CT PVD Sputtering System

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Model: SC1500

In-line Magnetron Sputtering System SC1500

SC1500 In-Line Sputtering or Evaporation System

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Model: SC902/903

In-line Sputtering System SC902/903

SC902/903 Sputtering System

Model: SC943

In-line Magnetron Sputtering System SC943

SC943 PVD Sputtering System

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Model: SC6600

Perkin-Elmer remanufactured unit

SC6600 PVD Sputtering System

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Model: SC603

In-line Sputtering Machine SC603

SC603 Sputtering System

Model: SC643

In-line Sputtering System SC643

SC643 Sputtering System

Model: SC8600

Semicore 8600 Series DLC Tribology Coater

SC8600 DLC Tribology Coater

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And, if you have not found what you need in any standard PVD coating machine, Semicore is fully capable of working with you to engineer, develop, and manufacture a practical one-off or limited run quantity of what you need with an in-line sputtering system and batch evaporation equipment.

For a more in depth understanding of the technical details involved in Semicore’s thin film deposition sputtering systems, please review our white papers below on PVD coating systems and allow us to answer any questions you have at or by calling 925-373-8201.


Sputtering is the manufacturing process at the heart of today’s semiconductors, CDs, disk drives and optical devices industries. On an atomic level, sputtering is the process whereby atoms of a target or source material is bombarded by high energy particles in a vacuum environment that “knocks off” or “sputters” atoms that are deposited as a thin film onto a substrate – such as a silicon wafer, solar panel or optical device… Read More

There are several forms of Thin Film Deposition which is a vacuum technology for applying coatings of pure materials to the surface of various objects. The coatings are usually in the thickness range of angstroms to microns and can be a single material, or multiple materials in a layered structure… Read More

An “In-Line” PVD Sputtering System is one in which substrates pass linearly beneath one or more Sputter cathodes to acquire their Thin Film coating. Normally the substrates are loaded onto a carrier or pallet in order to facilitate this motion, and some smaller systems handle just one pallet per batch run… Read More