Semicore offers a wide assortment of sputtering targets and thin film deposition materials that complement our PVD Coating systems satisfying virtually any requirement.
Our sputtering targets come in a wide variety of sizes and materials, including pure elements or compounds and alloys in purities ranging from commercial grade 99.9% purity to the highest, 99.999% zone refined Ultra-Pure grade.
We supply the most commonly requested target shapes – round, rectangular, Ring, ConMag, Quantum, S-Gun – as well as the more conventional sizes. If we do not have the shape you need, we can create a custom sputter targets order for you with any of the materials and purities we carry.
The table below shows the wide range of materials we offer. Please use the link below to request a quote for sputtering targets. If you don’t see the material options you are looking for please contact us and our experienced support team will be happy to assist you.
Tell us what vacuum deposition equipment you are using and we can provide you the specifications you need. We supply pure PVD metal targets including gold sputtering targets, titanium-aluminum, vanadium molybdenum and niobium alloy compound targets, rotatable targets as well as small bench top coater targets often used for R&D applications.
We can help you determine the deposition materials you need to match your physical deposition requirements, and can help you formulate the best alloys and compounds to meet your exact thin film coating specifications.
Metals | Alloys | Superconducting Alloys
Borides | Carbides | Fluorides | Nitrides | Oxides | Selenides | Silicides | Sulfides | Tellurides
| Materials | Composition | Sputtering Targets | E-Beam Sources | Evap. Mat’ls | Purities |
|---|---|---|---|---|---|
| METALS | |||||
| ALUMINUM | Al | x | x | x | 99.99- 99.9999% |
| ANTIMONY | Sb | x | x | x | 99.999- 99.99999% |
| ARSENIC | As | x | 99, 99.999% | ||
| BARIUM | Ba | x | x | 99.5% | |
| BERYLLIUM | Be | x | x | x | 98- 99.9% |
| BISMUTH | Bi | x | x | x | 99.9, 99.999% |
| BORON | B | x | x | 99.5% | |
| CADMIUM | Cd | x | x | x | 99.999% |
| CALCIUM | Ca | x | 99.5% | ||
| CARBON | C | x | x | x | 99.999% |
| CERIUM | Ce | x | x | 99.9% | |
| CESIUM | Cs | x | 99.95% | ||
| CHROMIUM | Cr | x | x | x | 99.95% |
| COBALT | Co | x | x | x | 99.9% |
| COPPER | Cu | x | x | x | 99.99, 99.999% |
| DYSPROSIUM | Dy | x | 99.9% | ||
| ERBIUM | Er | x | 99.9% | ||
| GADOLINIUM | Gd | x | 99.9% | ||
| GALLIUM | Ga | x | 99.999, 99.9999% | ||
| GERMANIUM | Ge | x | x | x | 99.999% |
| GOLD | Au | x | x | x | 99.99, 99.999% |
| HAFNIUM | Hf | x | x | x | 99.9% |
| HOLMIUM | Ho | x | 99.9% | ||
| INDIUM | In | x | x | x | 99.99- 99.9999% |
| IRIDIUM | Ir | x | x | x | 99.9% |
| IRON | Fe | x | x | x | 99.9 99.95% |
| LANTHANUM | La | x | 99.9% | ||
| LEAD | Pb | x | x | x | 99.995% |
| MAGNESIUM | Mg | x | x | x | 99.95% |
| MANGANESE | Mn | x | x | x | 99.9% |
| MOLYBDENUM | Mo | x | x | x | 99.95% |
| NEODYMIUM | Nd | x | x | x | 99.9% |
| NICKEL | Ni | x | x | x | 99.7, 99.995% |
| NIOBIUM | Nb | x | x | x | 99.95% |
| PALLADIUM | Pd | x | x | x | 99.95% |
| PLATINUM | Pt | x | x | x | 99.99% |
| PRASEODYMIUM | Pr | x | x | x | 99.9% |
| RHENIUM | Re | x | x | x | 99.9% |
| RUBIDIUM | Rb | x | x | x | 99.8% |
| RUTHENIUM | Ru | x | x | x | 99.9% |
| SAMARIUM | Sm | x | 99.9% | ||
| SCANDIUM | Sc | x | 99.9% | ||
| SELENIUM | Se | x | x | x | 99.999- 99.9999% |
| SILICON | Si | x | x | x | 99.999% |
| SILVER | Ag | x | x | x | 99.99% |
| STRONTIUM | Sr | x | 99.5% | ||
| TANTALUM | Ta | x | x | x | 99.95% |
| TELLURIUM | Te | x | x | x | 99.999% |
| TERBIUM | Tb | x | 99.9% | ||
| THALLIUM | Tl | x | 99.9% | ||
| THORIUM | Th | x | 99.8% | ||
| THULIUM | Tm | x | 99.9% | ||
| TIN | Sn | x | x | x | 99.99% |
| TITANIUM | Ti | x | x | x | 99.7- 99.995% |
| TUNGSTEN | W | x | x | x | 99.95% |
| VANADIUM | V | x | x | x | 99.9% |
| YTTERBIUM | Yb | x | x | x | 99.9% |
| YTTRIUM | Y | x | x | x | 99.9% |
| ZINC | Zn | x | x | x | 99.99, 99.995% |
| ZIRCONIUM | Zr | x | x | x | 99.7% |
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| ALLOYS | |||||
| ALUMINUM – CHROMIUM | (Al)X (Cr)1-X | x | x | x | 99.99% |
| ALUMINUM – COBALT | (Al)X (Co)1-X | x | x | x | 99.95% |
| ALUMINUM- COPPER | (Al)X (Cu)1-X | x | x | x | 99.9- 99.9999% |
| ALUMINUM – IRON | (Al)X (Fe)1-X | x | x | x | 99.99% |
| ALUMINUM – SILICON | (Al)X (Si)1-X | x | x | x | 99.9- 99.9999% |
| ALUMINUM – SILICON – COPPER | (Al)X (Si)Y (Cu)Z | x | x | x | 99.9- 99.9999% |
| ALUMINUM – TITANIUM | (Al)50 (Ti)50 | x | x | x | 99.95% |
| CHROMIUM – SILICON MONOXIDE | (Cr)X (SiO)1-X | x | x | x | 99.9% |
| CHROMIUM – NICKEL | (Cr)X(Ni)1-X | x | x | x | 99.9% |
| CHROMIUM – COBALT | (Cr)X(Co)1-X | x | x | x | 99.5% |
| CHROMIUM – COBALT – NICKEL | (Cr)X (Co)Y (Ni)Z | x | x | x | 99.5% |
| COBALT – NICKEL | (Co)X(Ni)1-X | x | x | x | 99.5% |
| IRON – NICKEL (PERMALLOY) | (Fe)19 (Ni)81 | x | x | x | 99.9% |
| INDIUM – TIN | (In)X (Sn)1-X | x | x | x | 99.99, 99.999% |
| NICKEL – VANADIUM | (Ni)93 (V)07 | x | x | x | 99.95% |
| TITANIUM – TUNGSTEN | (Ti)10 (W)90 | x | x | x | 99.99% |
| TITANIUM – TUNGSTEN | (Ti)15 (W)85 | x | x | x | 99.99% |
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| SUPERCONDUCTING ALLOYS | |||||
| YTTRIUM – BARIUM COPPER OXIDE | 1-2-3 | x | x | 99.9- 99.999% | |
| BISMUTH – CALCIUM – STRONTIUM – COPPER OXIDE | 2-2-2-3 | x | x | 99.9- 99.999% | |
| BISMUTH – LEAD – CALCIUM – STRONTIUM – COPPER OXIDE | 1.94-0.06-2-2-3 | x | x | 99.9- 99.999% | |
| THALLIUM – BARIUM – CALCIUM – COPPER OXIDE | 2-2-2-3 | x | x | 99.9- 99.999% | |
| ERBIUM – BARIUM – COPPER OXIDE | 1-2-3 | x | x | 99.9- 99.999% | |
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| BORIDES | |||||
| ALUMINUM BORIDE | AlB2 | x | x | x | 99% |
| CHROMIUM BORIDE | CrB2 | x | x | x | 99.5% |
| HAFNIUM BORIDE | HfB2 | x | x | x | 99.5% |
| LANTHANUM BORIDE | LaB6 | x | x | x | 99.5% |
| MOLYBDENUM BORIDE | Mo2B5, MoB2 | x | x | x | 99.5% |
| NIOBIUM BORIDE | NbB2 | x | x | x | 99.5% |
| TANTALUM BORIDE | TaB2 | x | x | x | 99.5% |
| TITANIUM BORIDE | TiB2 | x | x | x | 99.5% |
| TUNGSTEN BORIDE | WB, W2B | x | x | x | 99.5% |
| VANADIUM BORIDE | VB2 | x | x | x | 99.5% |
| ZIRCONIUM BORIDE | ZrB2 | x | x | x | 99.5% |
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| CARBIDES | |||||
| BORON CARBIDE | B4C | x | x | x | 99.5% |
| CHROMIUM CARBIDE | Cr3C2 | x | x | x | 99.5% |
| HAFNIUM CARBIDE | HfC | x | x | x | 99.5% |
| MOLYBDENUM CARBIDE | MoC | x | x | x | 99.5% |
| NIOBIUM CARBIDE | NbC | x | x | x | 99.5% |
| SILICON CARBIDE | SiC | x | x | x | 99.5% |
| TANTALUM CARBIDE | TaC | x | x | x | 99.5% |
| TITANIUM CARBIDE | TiC | x | x | x | 99.5% |
| TUNGSTEN CARBIDE | WC | x | x | x | 99.95% |
| VANADIUM CARBIDE | VC | x | x | x | 99.5% |
| ZIRCONIUM CARBIDE | ZrC | x | x | x | 99.5% |
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| FLUORIDES | |||||
| ALUMINUM FLUORIDE | AlF3 | x | x | x | 99.5% |
| BARIUM FLUORIDE | BaF2 | x | x | x | 99.9% |
| CALCIUM FLUORIDE | CaF2 | x | x | x | 99.9% |
| CERIUM FLUORIDE | CeF3 | x | x | x | 99.9% |
| LANTHANUM FLUORIDE | LaF3 | x | x | x | 99.9% |
| LEAD FLUORIDE | PbF2 | x | x | x | 99.9% |
| LITHIUM FLUORIDE | LiF | x | x | x | 99.9% |
| MAGNESIUM FLUORIDE | MgF2 | x | x | x | 99.9% |
| SODIUM FLUORIDE | NaF | x | x | x | 99.9% |
| STRONTIUM FLUORIDE | SrF2 | x | x | x | 99.9% |
| THORIUM FLUORIDE | ThF4 | x | x | x | 99.9% |
| YTTRIUM FLUORIDE | YF3 | x | x | x | 99.9% |
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| NITRIDES | |||||
| ALUMINUM NITRIDE | AlN | x | x | x | 99.5% |
| BORON NITRIDE | BN | x | x | x | 99.5% |
| HAFNIUM NITRIDE | HfN | x | x | x | 99.5% |
| SILICON NITRIDE | Si3N4 | x | x | x | 99.9% |
| TANTALUM NITRIDE | TaN | x | x | x | 99.5% |
| TITANIUM NITRIDE | TiN | x | x | x | 99.5% |
| VANADIUM NITRIDE | VN | x | x | x | 99.5% |
| ZIRCONIUM NITRIDE | ZrN | x | x | x | 99.5% |
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| OXIDES | |||||
| ALUMINUM OXIDE | Al2O3 | x | x | x | 99.99% |
| ANTIMONY OXIDE | Sb2O3 | x | x | x | 99.99% |
| BARIUM TITANATE | BaTiO3 | x | x | x | 99.9% |
| BERYLLIUM OXIDE | BeO | x | x | x | 99.5% |
| BISMUTH OXIDE | Bi2O3 | x | x | x | 99.9% |
| BISMUTH TITANATE | Bi4TiO3 | x | x | x | 99.9% |
| CERIUM OXIDE | CeO2 | x | x | x | 99.99% |
| CHROMIUM OXIDE | Cr2O3 | x | x | x | 99.9% |
| DYSPROSIUM OXIDE | Dy2O3 | x | x | x | 99.9% |
| ERBIUM OXIDE | Er2O3 | x | x | x | 99.9% |
| EUROPIUM OXIDE | Eu2O3 | x | x | x | 99.5% |
| GALLIUM OXIDE | Ga2O3 | x | x | x | 99.999% |
| GERMANIUM OXIDE | GeO2 | x | x | x | 99.999% |
| HAFNIUM OXIDE | HfO2 | x | x | x | 99.9% |
| HOLMIUM OXIDE | Ho2O3 | x | x | x | 99.9% |
| INDIUM OXIDE | In2O3 | x | x | x | 99.99% |
| INDIUM TIN OXIDE | (In2O3)X (SnO2)1-X | x | x | x | 99.99% |
| IRON OXIDE | Fe2O3, Fe2O4 | x | x | x | 99.5- 99.9% |
| LANTHANUM OXIDE | La2O3 | x | x | x | 99.99% |
| LEAD TITANATE | PbTiO3 | x | x | x | 99.9% |
| MAGNESIUM OXIDE | MgO | x | x | x | 99.95% |
| MANGANESE OXIDE | MnO, MnO2, Mn2O3 | x | x | x | 99.9% |
| MOLYBDENUM OXIDE | MoO2, MoO3 | x | x | x | 99.9% |
| NEODYMIUM OXIDE | Nd2O3 | x | x | x | 99.9% |
| NICKEL OXIDE | NiO | x | x | x | 99.9% |
| NIOBIUM OXIDE | Nb2O5 | x | x | x | 99.95% |
| PRASEODYMIUM OXIDE | Pr2O3 | x | x | x | 99.9% |
| SAMARIUM OXIDE | Sm2O3 | x | x | x | 99.9% |
| SILICON DIOXIDE | SiO2 | x | x | x | 99.995% |
| SILICON MONOXIDE | SiO | x | x | x | 99.9% |
| STRONTIUM OXIDE | SrO | x | x | x | 99.5% |
| STRONTIUM TITANATE | SrTiO3 | x | x | x | 99.9% |
| TANTALUM OXIDE | Ta2O5 | x | x | x | 99.9% |
| THORIUM OXIDE | ThO2 | x | x | x | 99.9% |
| TIN OXIDE | SnO2 | x | x | x | 99.9% |
| TIN OXIDE – ANTIMONY OXIDE | SnO2 – Sb2O3 | x | x | x | 99.9% |
| TITANIUM OXIDE | TiO2, Ti2O3 | x | x | x | 99.9% |
| TUNGSTEN OXIDE | WO3 | x | x | x | 99.9% |
| YTTRIUM OXIDE | Y2O3 | x | x | x | 99.9% |
| ZINC OXIDE | ZnO | x | x | x | 99.9, 99.99% |
| ZIRCONIUM OXIDE | ZrO2 | x | x | x | 99.9% |
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| SELENIDES | |||||
| CADMIUM SELENIDE | CdSe | x | x | x | 99.995% |
| LEAD SELENIDE | PbSe | x | x | x | 99.95% |
| MOLYBDENUM SELENIDE | MoSe2 | x | x | x | 99.9% |
| NIOBIUM SELENIDE | NbSe2 | x | x | x | 99.8% |
| TANTALUM SELENIDE | TaSe | x | x | x | 99.4% |
| TUNGSTEN SELENIDE | WSe2 | x | x | x | 99.8% |
| ZINC SELENIDE | ZnSe | x | x | x | 99.9% |
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| SILICIDES | |||||
| ALUMINUM SILICIDE | AlSi2 | x | x | x | 99.5% |
| CHROMIUM SILICIDE | CrSi2, Cr3Si | x | x | x | 99.5% |
| COBALT SILICIDE | CiSi2 | x | x | x | 99.5% |
| HAFNIUM SILICIDE | HfSi2 | x | x | x | 99.5% |
| IRON SILICIDE | FeSi2 | x | x | x | 99.5% |
| MOLYBDENUM SILICIDE | MoSi2 | x | x | x | 99.5% |
| NIOBIUM SILICIDE | NbSi2 | x | x | x | 99.5% |
| TANTALUM SILICIDE | TaSi2, TaSi3 | x | x | x | 99.5% |
| TITANIUM SILICIDE | Ti5Si2, TaSi3 | x | x | x | 99.9% |
| TUNGSTEN SILICIDE | WSi2 | x | x | x | 99.9% |
| VANADIUM SILICIDE | VSi2, V3Si | x | x | x | 99.5% |
| ZIRCONIUM SILICIDE | ZrSi2 | x | x | x | 99.5% |
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| SULFIDES | |||||
| ARSENIC SULFIDE | As2S3 | x | x | x | 99.9% |
| CADMIUM SULFIDE | CdS | x | x | x | 99.99% |
| INDIUM SULFIDE | In2S3 | x | x | x | 99.99% |
| LEAD SULFIDE | PbS | x | x | x | 99.9% |
| MOLYBDENUM SULFIDE | MoS2 | x | x | x | 99% |
| TANTALUM SULFIDE | TaS2 | x | x | x | 99.9% |
| TUNGSTEN SULFIDE | WS2 | x | x | x | 99.8% |
| ZINC SULFIDE | ZnS | x | x | x | 99.99% |
| ZIRCONIUM SULFIDE | ZrS2 | x | x | x | 99.9% |
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| TELLURIDES | |||||
| CADMIUM TELLURIDE | CdTe | x | x | x | 99.99% |
| LEAD TELLURIDE | PbTe | x | x | x | 99.99% |
| MOLYBDENUM TELLURIDE | MoTe2 | x | x | x | 99.9% |
| NIOBIUM TELLURIDE | NbTe2 | x | x | x | 99.8% |
| TANTALUM TELLURIDE | TaTe2 | x | x | x | 99.8% |
| TUNGSTEN TELLURIDE | WTe2 | x | x | x | 99.8% |
| ZINC TELLURIDE | ZnTe | x | x | x | 99.99% |
Sputtering is the thin film deposition manufacturing process at the heart of today’s semiconductors, disk drives, CDs, photovoltaics, flat panel displays, and optical devices.
Semicore Equipment, Inc. is a leading worldwide supplier of sputtering equipment for the electronics, optical, solar energy, medical, automotive, military and related high technology industries. Please allow our support staff to answer any questions you have regarding how to implement the best equipment and techniques for your specific sputtering target needs by contacting us at sales@semicore.com or calling 925-373-8201.
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Semicore Equipment, Inc. can supply all your Sputter Target needs!